Abstract

PERDOMO-CAMPOS, Alejandro et al. Piezoresistive pressure sensor model using the solution of an inverse optimization problem. EAC [online]. 2020, vol.41, n.3, pp.93-107.  Epub Dec 01, 2020. ISSN 1815-5928.

The use of generic commercial pressure sensors to produce pressure transmitters allows to reduce costs and develop instrumentation for several applications, without the need of manufacturing the sensor. Electrical models for commercial sensors are an important tool for the design of the signal conditioning circuits that these sensors need. In the technical specifications of commercial sensors, it is not common to find the data of the piezoresistors that conform the bridge, and there is no practical way to measure this data. The objective of this work is to develop an electrical model compatible with SPICE that can be applied to commercial piezoresistive bridges and that models the quadratic component of the thermal variation, since there were no models available with these requirements. In the model obtained, the parameters are extracted by solving an inverse optimization problem based on bridge data without having the piezoresistor parameters. As a result, a comparison is made between the output voltages of five commercial sensors and the simulated output of their corresponding electrical models. As an application example, the simulation in PSPICE is presented using the developed model of a basic offset voltage compensation method and its thermal dependence, taking into account the quadratic component of the thermal variation.

Keywords : piezoresistive pressure sensor; inverse problem; optimization; electrical model.

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